Published by: American Vacuum Society
2022 article number: 164
Print ISSN: 2166-2746
Online ISSN: 2166-2754
Journal number of registered peer reviews: 0
Journal number of reviewers: 0
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena Journal Editors
| Editor | Affiliation |
|---|---|
| Eray Aydil | Chemical and Biomolecular Engineering Department, New York University Tandon School of Engineering, Brooklyn |
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